JPH0251262U - - Google Patents

Info

Publication number
JPH0251262U
JPH0251262U JP12941488U JP12941488U JPH0251262U JP H0251262 U JPH0251262 U JP H0251262U JP 12941488 U JP12941488 U JP 12941488U JP 12941488 U JP12941488 U JP 12941488U JP H0251262 U JPH0251262 U JP H0251262U
Authority
JP
Japan
Prior art keywords
etching apparatus
nozzles
etching
etched
equal intervals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12941488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12941488U priority Critical patent/JPH0251262U/ja
Publication of JPH0251262U publication Critical patent/JPH0251262U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP12941488U 1988-09-30 1988-09-30 Pending JPH0251262U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12941488U JPH0251262U (en]) 1988-09-30 1988-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12941488U JPH0251262U (en]) 1988-09-30 1988-09-30

Publications (1)

Publication Number Publication Date
JPH0251262U true JPH0251262U (en]) 1990-04-10

Family

ID=31383668

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12941488U Pending JPH0251262U (en]) 1988-09-30 1988-09-30

Country Status (1)

Country Link
JP (1) JPH0251262U (en])

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5993881A (ja) * 1982-11-17 1984-05-30 Hitachi Chem Co Ltd エツチング装置
JPS62202087A (ja) * 1986-02-28 1987-09-05 Matsushita Electric Ind Co Ltd エツチング方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5993881A (ja) * 1982-11-17 1984-05-30 Hitachi Chem Co Ltd エツチング装置
JPS62202087A (ja) * 1986-02-28 1987-09-05 Matsushita Electric Ind Co Ltd エツチング方法

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